RM
Microelectromechanical device
Microelectromechanical device on a finger tip. MEMS (microelectromechanical systems) are mechanical and electrical devices constructed on a microscopic scale. Here, several components have been constructed on a square piece of silicon. MEMS components often look like their larger-scale counterparts, but need to be designed differently due to surface effects (electrostatics and wetting) dominating volume effects (inertia and thermal properties). Applications include microscopic sensors and optical display technologies. This MEMS device has been developed at the French ENSMM (Ecole Nationale Superieure de Mecanique et des Microtechniques), by Raymond Chaleat's research group.
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